✦ LIBER ✦
Local optical emission spectroscopy of excited species effused from an evaporation cell and a sputter source into dense plasmas – Basic studies for the deposition of thin gradient films
✍ Scribed by H. Bolt; V. Hemel; F. Koch; H. Nickel
- Book ID
- 113022354
- Publisher
- Springer
- Year
- 1996
- Tongue
- English
- Weight
- 66 KB
- Volume
- 355
- Category
- Article
- ISSN
- 1618-2650
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