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Optical Emission Spectroscopy of Abnormal Glow Region in Nitrogen Plasma

✍ Scribed by A. Qayyum; Shaista Zeb; Shujaat Ali; A. Waheed; M. Zakaullah


Publisher
Springer
Year
2005
Tongue
English
Weight
169 KB
Volume
25
Category
Article
ISSN
0272-4324

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Optical emission spectroscopy (OES) is a non-intrusive diagnostic technique, widely used to study different kinds of plasmas. In the present work, a locally resolved OES technique was used to obtain near cathode (substrate) emission spectra for N 2 -H 2 glow discharges. It was observed that, along w