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Optical emission spectroscopy of a PCVD process used for the deposition of TiN on cemented carbides

✍ Scribed by S. Peter; F. Richter; R. Tabersky; U. König

Book ID: 114085227
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 203 KB
Volume: 377-378
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(00)01270-0

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