✦ LIBER ✦
Analysis of a reactive sputter ion plating discharge for TiN deposition using optical emission spectroscopy
✍ Scribed by A. Ricard; H. Michel; P. Jacquot; M. Gantois
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 289 KB
- Volume
- 124
- Category
- Article
- ISSN
- 0040-6090
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