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Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering

✍ Scribed by M. Koufaki; M. Sifakis; E. Iliopoulos; N. Pelekanos; M. Modreanu; V. Cimalla; G. Ecke; E. Aperathitis

No coin nor oath required. For personal study only.

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