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Optical, electrical and mechanical properties of nitrogen-rich carbon nitride films deposited by inductively coupled plasma chemical vapor deposition

✍ Scribed by C Popov; L.M Zambov; M.F Plass; W Kulisch

Book ID: 114085272
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 270 KB
Volume: 377-378
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(00)01316-x

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