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Optical characterization of doped top layers in SOI structures formed by ion implantation

โœ Scribed by Yu Yuehui; Liu Xianghuai; Zou Shichang; P.L.F. Hemment

Book ID
113286849
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
410 KB
Volume
106
Category
Article
ISSN
0168-583X

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