Optical and structural properties of hydrogenated silicon films prepared by rf-magnetron sputtering at low growth temperatures: Study as function of argon gas dilution

✍ Scribed by Y. Bouizem; K. Kefif; J.D. Sib; D. Benlakehal; A. Kebab; A. Belfedal; L. Chahed

• Book ID: 116672988
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 614 KB
• Volume: 358
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/j.jnoncrysol.2011.12.077