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Optical and photo-carrier characterization of ultra-shallow junctions in silicon

✍ Scribed by QiuPing Huang, BinCheng Li, ShengDong Ren

Book ID
120799774
Publisher
Science in China Press (SCP)
Year
2013
Tongue
English
Weight
631 KB
Volume
56
Category
Article
ISSN
1672-1799

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