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Infrared spectroscopic ellipsometry applied to the characterization of ultra shallow junction on silicon and SOI
✍ Scribed by C. Defranoux; T. Emeraud; S. Bourtault; J. Venturini; P. Boher; M. Hernandez; C. Laviron; T. Noguchi
- Book ID
- 113936799
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 826 KB
- Volume
- 455-456
- Category
- Article
- ISSN
- 0040-6090
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