Characterization of nano-depth junctions in silicon by using Photo-Carrier Radiometry (PCR)

✍ Scribed by J. A. Garcia; X. Guo; A. Mandelis; D. Shaughnessy; L. Nicolaides; A. Salnik

• Book ID: 111633315
• Publisher: Springer-Verlag
• Year: 2008
• Tongue: English
• Weight: 114 KB
• Volume: 153
• Category: Article
• ISSN: 1951-6355
• DOI: 10.1140/epjst/e2008-00447-y