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Optical and electrical properties of doped zinc oxide films prepared by ac reactive magnetron sputtering

✍ Scribed by B. Szyszka; S. Jäger

Book ID
117148482
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
500 KB
Volume
218
Category
Article
ISSN
0022-3093

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Optical and electrical properties of nanocrystal zinc oxide films prepared by dc magnetron sputtering at different sputtering pressures
✍ Atanas Tanuševski; Verka Georgieva 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 673 KB

The nanocrystal thin films of zinc oxide doped by Al (ZnO:Al) were deposited by dc reactive magnetron sputtering on the glass substrates, in the pressure range of 33-51 Pa. From the X-ray diffraction patterns, the nanocrystalline structure of ZnO:Al films and the grain size were determined. The opti