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Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering

✍ Scribed by Maoshui Lv; Xianwu Xiu; Zhiyong Pang; Ying Dai; Lina Ye; Chuanfu Cheng; Shenghao Han


Book ID
108289827
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
494 KB
Volume
516
Category
Article
ISSN
0040-6090

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The nanocrystal thin films of zinc oxide doped by Al (ZnO:Al) were deposited by dc reactive magnetron sputtering on the glass substrates, in the pressure range of 33-51 Pa. From the X-ray diffraction patterns, the nanocrystalline structure of ZnO:Al films and the grain size were determined. The opti