One-dimensional fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers

✍ Scribed by Herrebout, D.; Bogaerts, A.; Yan, M.; Gijbels, R.; Goedheer, W.; Dekempeneer, E.

• Book ID: 121876487
• Publisher: American Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 291 KB
• Volume: 90
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1378059