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A one-dimensional fluid model for an acetylene RF discharge: a study of the plasma chemistry

✍ Scribed by Herrebout, D.; Bogaerts, A.; Gijbels, R.; Goedheer, W.J.; Vanhulsel, A.


Book ID
118061971
Publisher
IEEE
Year
2003
Tongue
English
Weight
392 KB
Volume
31
Category
Article
ISSN
0093-3813

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