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One-Dimensional Fluid Model of Methane Plasma for Diamond-Like Coating

✍ Scribed by Chien-Wei Chang; Davoudabadi, M.; Mashayek, F.

Book ID: 114667314
Publisher: IEEE
Year: 2010
Tongue: English
Weight: 1002 KB
Volume: 38
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2010.2049750

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