✦ LIBER ✦

On the reliability of nanoindentation hardness of Al2O3 films grown on Si-wafer by atomic layer deposition

✍ Scribed by Liu, Xuwen; Haimi, Eero; Hannula, Simo-Pekka; Ylivaara, Oili M. E.; Puurunen, Riikka L.

Book ID: 125472228
Publisher: AVS (American Vacuum Society)
Year: 2014
Tongue: English
Weight: 696 KB
Volume: 32
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.4842655

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Optical properties of Al_2O_3 thin films

Optical properties of Al_2O_3 thin films grown by atomic layer deposition

✍ Kumar, Pradeep ;Wiedmann, Monika K. ;Winter, Charles H. ;Avrutsky, Ivan 📂 Article 📅 2009 🏛 The Optical Society 🌐 English ⚖ 865 KB

Atomic layer deposition of Al2O3 thin fi

Atomic layer deposition of Al2O3 thin films on diamond

✍ Kawakami, Nobuyuki; Yokota, Yoshihiro; Tachibana, Takeshi; Hayashi, Kazushi; Kob 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 289 KB

Atomic Layer Deposition of Al 2 O 3 Film

Atomic Layer Deposition of Al 2 O 3 Films on Polyethylene Particles

✍ Ferguson, J. D.; Weimer, A. W.; George, S. M. 📂 Article 📅 2004 🏛 American Chemical Society 🌐 English ⚖ 251 KB

Effects of annealing temperature and Al2

Effects of annealing temperature and Al2O3 buffer layer on ZnO thin films grown by atomic layer deposition

✍ C.R. Kim; J.Y. Lee; J.H. Heo; C.M. Shin; T.M. Lee; J.H. Park; H. Ryu; J.H. Chang 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 370 KB

Properties of Al2O3-films deposited on s

Properties of Al2O3-films deposited on silicon by atomic layer epitaxy

✍ Per Ericsson; Stefan Bengtsson; Jarmo Skarp 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 293 KB

A1203-films deposited by atomic layer epitaxy onto silicon wafers were investigated structurally and electrically. A post-deposition anneal at 900°C resulted in a decrease in film thickness of about 10% and an increase in the index of refraction of about 3%. The densification did not significantly i

Studies on the morphology of Al2O3 thin

Studies on the morphology of Al2O3 thin films grown by atomic layer epitaxy

✍ Mikko Ritala; Heini Saloniemi; Markku Leskelä; Thomas Prohaska; Gernot Friedbach 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 889 KB