On the problems of multiple overlayers in ellipsometry and a new look at multiple angle of incidence ellipsometry
β Scribed by O Hunderi
- Book ID
- 118981407
- Publisher
- Elsevier Science
- Year
- 1976
- Tongue
- English
- Weight
- 331 KB
- Volume
- 61
- Category
- Article
- ISSN
- 0039-6028
No coin nor oath required. For personal study only.
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## Applicability of Multiple Angle of Incidence Ellipsometry (MAI). Measurements to GaAs Anodic Oxide and GaP Anodic Oxide Systems at the Wavelength 632.8 nm Usefulness of MA1 in practical studies of unknown optical systems is controversial in literature. I n the present paper i t is shown that th
## Abstract Several experimental results on common singleβlayer samples have been obtained in the microwave domain using the reflection ellipsometry technique and two different data analysis procedures. They lead to estimations of complex permittivity as a function of the angle of incidence, freque