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On the problems of multiple overlayers in ellipsometry and a new look at multiple angle of incidence ellipsometry

✍ Scribed by O Hunderi


Book ID
118981407
Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
331 KB
Volume
61
Category
Article
ISSN
0039-6028

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πŸ“œ SIMILAR VOLUMES


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## Applicability of Multiple Angle of Incidence Ellipsometry (MAI). Measurements to GaAs Anodic Oxide and GaP Anodic Oxide Systems at the Wavelength 632.8 nm Usefulness of MA1 in practical studies of unknown optical systems is controversial in literature. I n the present paper i t is shown that th

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## Abstract Several experimental results on common single‐layer samples have been obtained in the microwave domain using the reflection ellipsometry technique and two different data analysis procedures. They lead to estimations of complex permittivity as a function of the angle of incidence, freque