✦ LIBER ✦

Reflection ellipsometry for in-situ determination of complex permittivity and thickness of a single-layer material at several angles of incidence and frequencies

✍ Scribed by F. Sagnard

Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 185 KB
Volume: 36
Category: Article
ISSN: 0895-2477
DOI: 10.1002/mop.10733

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✦ Synopsis

Abstract

Several experimental results on common single‐layer samples have been obtained in the microwave domain using the reflection ellipsometry technique and two different data analysis procedures. They lead to estimations of complex permittivity as a function of the angle of incidence, frequency, and thickness. The influence of measurement uncertainties is discussed. © 2003 Wiley Periodicals, Inc. Microwave Opt Technol Lett 36: 243–248, 2003; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.10733

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