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Determination of complex permittivity and thickness of a single-layer material using reflection ellipsometry at several angles of incidence

✍ Scribed by F. Sagnard

Publisher
John Wiley and Sons
Year
2002
Tongue
English
Weight
136 KB
Volume
35
Category
Article
ISSN
0895-2477

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✦ Synopsis

Abstract

An analytic formulation is proposed to obtain both complex permittivity and thickness of a single‐layer material from reflection ellipsometry data obtained at more than two angles of incidence. The principle consists in decoupling the equations that involve both thickness and complex permittivity. The solution is based on multi‐steps numerical processing methods. © 2002 Wiley Periodicals, Inc. Microwave Opt Technol Lett 35: 154–157, 2002; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.10544

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