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Reflection and transmission ellipsometry data analysis for measuring the complex permittivity of a single-layer material at microwave frequencies

✍ Scribed by F. Sagnard; D. Seetharamdoo; V. Le Glaunec

Publisher
John Wiley and Sons
Year
2002
Tongue
English
Weight
254 KB
Volume
33
Category
Article
ISSN
0895-2477

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✦ Synopsis

Abstract

For in situ measurement of the complex permittivity of planar materials, a free‐space system based on reflection or transmission ellipsometry has been developed and extended to microwave frequencies. Different angles of incidence were studied in the range [35–50°]. Original numerical methods based on contour‐line charts and least‐square optimization have been developed. © 2002 Wiley Periodicals, Inc. Microwave Opt Technol Lett 33: 443–448, 2002; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.10346

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## Abstract An analytic formulation is proposed to obtain both complex permittivity and thickness of a single‐layer material from reflection ellipsometry data obtained at more than two angles of incidence. The principle consists in decoupling the equations that involve both thickness and complex pe