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On the nitridation-induced enhancement and degradation of MOSFET characteristics

✍ Scribed by H. Wong; Y.C. Cheng

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 232 KB
Volume: 33
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(90)90226-5

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