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On the nature of ion implantation induced dislocation loops in 4H-silicon carbide

✍ Scribed by Persson, P. O. Å.; Hultman, L.; Janson, M. S.; Hallén, A.; Yakimova, R.; Panknin, D.; Skorupa, W.


Book ID
120088098
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
682 KB
Volume
92
Category
Article
ISSN
0021-8979

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