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On the gettering efficiency of buried layers in dielectrically insulated structures

✍ Scribed by Kissinger, G. ;Tittelbach-Helmrich, K. ;Knopke, J. ;Retzlaff, U.

Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
201 KB
Volume
121
Category
Article
ISSN
0031-8965

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