✦ LIBER ✦

On the deposition mechanism of boron in silicon CVD epitaxy

✍ Scribed by Dr. H. Kühne; Diplom-Chem. W. Malze

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Suppression of epitaxial silicon layer d

✍ Th. Morgenstern; Dr. H. Kühne; G. A. Kokovin; N. A. Testova; A. A. Titov 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 460 KB 👁 1 views

On the adsorption- and equilibrium-refer

✍ Dipl.-Chem. H. Kühne 📂 Article 📅 1983 🏛 John Wiley and Sons 🌐 English ⚖ 413 KB 👁 1 views

The current understanding of epitaxial C

✍ Dr. H. Kühne; K.-W. Schröder 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 490 KB 👁 1 views

The current understanding of epitaxial C

✍ Dr. H. Kühne; K.-W. Schröder 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 443 KB 👁 1 views

Incorporation concentration dependence o

✍ H. Kühne 📂 Article 📅 1979 🏛 John Wiley and Sons 🌐 English ⚖ 467 KB

The current understanding of epitaxial C

✍ Dr. H. Kühne 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 431 KB 👁 1 views