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On depth profiling from PIXE yields

✍ Scribed by P. Regnier; I. Brissaud


Book ID
112707822
Publisher
Springer
Year
1987
Tongue
English
Weight
309 KB
Volume
117
Category
Article
ISSN
1588-2780

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A method to apply particle induced X-ray emission (PIXE) for depth profiling, based on the variation of the X-ray detection angle, is proposed. The procedure uses X-ray yields normalized to those emitted at a particular reference angle. Application of the method to implanted samples and thin metalli