Observation of multiple defect states at silicon–silicon nitride interfaces fabricated by low-frequency plasma-enhanced chemical vapor deposition

✍ Scribed by Schmidt, Jan; Schuurmans, Frank M.; Sinke, Wim C.; Glunz, Stefan W.; Aberle, Armin G.

• Book ID: 121406686
• Publisher: American Institute of Physics
• Year: 1997
• Tongue: English
• Weight: 263 KB
• Volume: 71
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.119512