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Carrier recombination at silicon–silicon nitride interfaces fabricated by plasma-enhanced chemical vapor deposition

✍ Scribed by Schmidt, Jan; Aberle, Armin G.

Book ID: 111677276
Publisher: American Institute of Physics
Year: 1999
Tongue: English
Weight: 442 KB
Volume: 85
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.369725

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