Radio frequency magnetron sputtering of Au and low temperature plasma enhanced chemical vapor deposition of silicon nitride for ring ultramicroelectrodes fabrication

✍ Scribed by Mingzhi Zhu; Zhuangde Jiang; Weixuan Jing; Biao Yang

• Book ID: 108167539
• Publisher: Elsevier
• Year: 2006
• Tongue: English
• Weight: 345 KB
• Volume: 596
• Category: Article
• ISSN: 1572-6657
• DOI: 10.1016/j.jelechem.2006.07.030