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Observation of local SIMOX layers by microprobe RBS

✍ Scribed by A. Kinomura; Y. Horino; Y. Mokuno; A. Chayahara; M. Kiuchi; K. Fujii; M. Takai; T. Lohner; H. Ryssel; R. Schork

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Observation of buried oxide layers in si

✍ A. Kinomura; T. Lohner; Y. Katayama; M. Takai; H. Ryssel; R. Schork; A. Chayahar 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 553 KB

Microprobe RBS analysis of localized pro

✍ R. Mimura; J. Tajima; T. Ochiai; Y.K. Park; M. Takai 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 194 KB

A channeling/RBS study of SOI structures

✍ K. Touhouche; Y. Tao; A. Yelon; G. Kajrys; Y. Trudeau; K. Oxorn; S. Bultena; G. 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 400 KB

Raman measurement of local SOI structure

✍ K. Kato; M. Takai; S. Namba; R. Schork; H. Ryssel 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 410 KB

Characterisation of implanted and evapor

✍ I.V. Mitchell; W. Maenhaut; H. Raemdonck; F. Bodart 📂 Article 📅 1982 🏛 Elsevier Science ⚖ 416 KB

Characterization of the interdiffusion i

✍ A. Markwitz; N. Vandesteene; M. Waldschmidt; G. Demortier 📂 Article 📅 1997 🏛 Springer 🌐 English ⚖ 71 KB