Characterization of the interdiffusion in Au-Al layers by RBS
β Scribed by A. Markwitz; N. Vandesteene; M. Waldschmidt; G. Demortier
- Book ID
- 105896692
- Publisher
- Springer
- Year
- 1997
- Tongue
- English
- Weight
- 71 KB
- Volume
- 358
- Category
- Article
- ISSN
- 1618-2650
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
Ion beam analysis (IBA) methods were used for the characterization of interdiffusion in thin Au-A1 multilayered systems. Conventional RBS with a high depth resolution at the specimen surface and at the interfaces (e.g. 14 nm in the depth of 255 nm) was used for gold depth profiling. In contrast to g
The surface and layer state of thin ion-beam-irradiated Au-Al layers was investigated with scanning high-energy ion microscopy (SHEIM), RBS and SEM. The thin metal layers (90 nm Au top layer and 200 nm A layer deposited on polished glassy carbon) were produced by evaporation and subsequently irradia
Ion beam-induced interdi β usion and phase formation processes in thin Cu-Al and Ag-Al multilayers were investigated with in situ RBS and X-ray di β raction (XRD), respectively. The metal layers were deposited by evaporation on polished glassy carbon and single-crystal silicon substrates. In order to