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Observation of buried oxide layers in silicon by microprobe RBS

✍ Scribed by A. Kinomura; T. Lohner; Y. Katayama; M. Takai; H. Ryssel; R. Schork; A. Chayahara; Y. Horino; K. Fujii; M. Satou

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Observation of local SIMOX layers by mic

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FTIR and RBS study of ion-beam synthesiz

✍ A.P. Patel; A.D. Yadav; S.K. Dubey; B.K. Panigrahi; K.G.M. Nair 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 171 KB

Synthesis of buried silicon oxide layers

✍ I. Großhans; K. Volz; W. Ensinger; B. Rauschenbach 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 378 KB

Ion beam synthesis of buried oxide layer

✍ Manabu Ishimaru; Robert M Dickerson; Kurt E Sickafus 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 384 KB

RBS/Simulated annealing analysis of buri

✍ N.P. Barradas; C. Jeynes; S.M. Jackson 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 345 KB

Formation of buried oxide layers by high

✍ K. Das; J. B. Butcher; K. V. Anand 📂 Article 📅 1984 🏛 Springer US 🌐 English ⚖ 646 KB