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Synthesis of buried silicon oxide layers by water plasma immersion implantation

✍ Scribed by I. Großhans; K. Volz; W. Ensinger; B. Rauschenbach

Book ID: 114171452
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 378 KB
Volume: 155
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(99)00398-5

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