Microprobe RBS analysis of localized processed areas by FIB etching and deposition

✍ Scribed by R. Mimura; J. Tajima; T. Ochiai; Y.K. Park; M. Takai

• Book ID: 114164797
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 194 KB
• Volume: 181
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(01)00491-8