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Numerical simulation of plasma immersion ion implantation on the inner surface of a cylindrical dielectric target

✍ Scribed by Li, Yun-Hu; Li, Xue-Chun; Wang, You-Nian

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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Ion current on the inner surface of a pi

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Plasma-immersion ion implantation of the

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