✦ LIBER ✦

Numerical simulation of nanoparticle-generating electronegative plasmas in the PECVD of nanostructured silicon film

✍ Scribed by I Denysenko; K Ostrikov; P.P Rutkevych; S Xu

Book ID: 116374156
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 265 KB
Volume: 30
Category: Article
ISSN: 0927-0256
DOI: 10.1016/j.commatsci.2004.02.015

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Numerical simulation of an explosive pla

Numerical simulation of an explosive plasma generator in the gasdynamic approximation

✍ G. S. Romanov; V. V. Urban 📂 Article 📅 1979 🏛 Springer US 🌐 English ⚖ 497 KB

Self-Organization and Dynamics of Nanopa

Self-Organization and Dynamics of Nanoparticles in Chemically Active Plasmas for Low-Temperature Deposition of Silicon and Carbon-Based Nanostructured Films

✍ S. V. Vladimirov; K. Ostrikov 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 345 KB

Self-Organization and Dynamics of Nanopa

Self-Organization and Dynamics of Nanoparticles in Chemically Active Plasmas for Low-Temperature Deposition of Silicon and Carbon-Based Nanostructured Films

✍ S. V. Vladimirov; K. Ostrikov 📂 Article 📅 2004 🏛 John Wiley and Sons ⚖ 58 KB

Low-Pressure PECVD of Nanoparticles in C

Low-Pressure PECVD of Nanoparticles in Carbon Thin Films from Ar/H2/C2H2 Plasmas: Synthesis of Films and Analysis of the Electron Energy Distribution Function

✍ M. Camero; F. J. Gordillo-Vázquez; C. Gómez-Aleixandre 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 688 KB

## Abstract A study of the synthesis of carbon nanoparticles embedded in carbon thin films deposited by radiofrequency (RF) (13.56 MHz) Ar/H~2~ (4 %)/C~2~H~2~ plasmas is presented. The carbon nanospheres exhibit an amorphous structure that is clearly observed at 300 W, under 0.1 Torr, and grows in

Specific features of silicon surface reg

Specific features of silicon surface region fluorination by RIE in r.f. CF4 plasma – A novel method for improving the electrical properties of thin PECVD silicon oxide films

✍ Małgorzata Kalisz; Robert Mroczyński 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 754 KB

Shortening of the radiation pulse from a

Shortening of the radiation pulse from a plasma relativistic microwave generator in numerical calculations with plasma simulation by the particle-in-cell method

✍ I. L. Bogdankevich; O. T. Loza; D. A. Pavlov 📂 Article 📅 2010 🏛 Allerton Press, Inc. 🌐 English ⚖ 546 KB