Self-Organization and Dynamics of Nanoparticles in Chemically Active Plasmas for Low-Temperature Deposition of Silicon and Carbon-Based Nanostructured Films

✍ Scribed by S. V. Vladimirov; K. Ostrikov

• Book ID: 111538795
• Publisher: Springer
• Year: 2003
• Tongue: English
• Weight: 345 KB
• Volume: 8
• Category: Article
• ISSN: 1084-0184
• DOI: 10.1023/a:1024050512623