✦ LIBER ✦
Self-Organization and Dynamics of Nanoparticles in Chemically Active Plasmas for Low-Temperature Deposition of Silicon and Carbon-Based Nanostructured Films
✍ Scribed by S. V. Vladimirov; K. Ostrikov
- Publisher
- John Wiley and Sons
- Year
- 2004
- Weight
- 58 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0931-7597
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