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Numerical Analysis of Tuning Procedure of a Waveguide-Based Microwave Plasma Source

✍ Scribed by Nowakowska, Helena; Jasi¿ski, Mariusz; Mizeraczyk, Jerzy

Book ID
121444109
Publisher
IEEE
Year
2011
Tongue
English
Weight
322 KB
Volume
39
Category
Article
ISSN
0093-3813

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## Abstract A new microwave annular waveguide plasma source with slot antennas is introduced in this paper. The distributions of electromagnetic field within the rectangular waveguide and the annular waveguide are simulated and analyzed, and the relationship between the distributions of the electro