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Numerical Analysis and Optimization of Power Coupling Efficiency in Waveguide-Based Microwave Plasma Source

✍ Scribed by Nowakowska, H.; Jasinski, M.; Debicki, P.S.; Mizeraczyk, J.

Book ID: 114667469
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 798 KB
Volume: 39
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2011.2163531

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