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Numerical Analysis of the Electromagnetic Fields in a Microwave Plasma Source Excited by Azimuthally Symmetric Surface Waves

โœ Scribed by Kousaka, Hiroyuki; Ono, Kouichi


Book ID
125533126
Publisher
Institute of Pure and Applied Physics
Year
2002
Tongue
English
Weight
551 KB
Volume
41
Category
Article
ISSN
0021-4922

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