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Numerical Analysis of the Electromagnetic Fields in a Microwave Plasma Source Excited by Azimuthally Symmetric Surface Waves

✍ Scribed by Kousaka, Hiroyuki; Ono, Kouichi

Book ID: 125533126
Publisher: Institute of Pure and Applied Physics
Year: 2002
Tongue: English
Weight: 551 KB
Volume: 41
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.41.2199

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