Numerical simulation and design of a new microwave annular waveguide plasma source—I: Simulations without the plasma parameters
✍ Scribed by Fan Liu; Jianhua Wang; Songyuan Dai
- Publisher
- John Wiley and Sons
- Year
- 2010
- Tongue
- English
- Weight
- 360 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0894-3370
- DOI
- 10.1002/jnm.797
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✦ Synopsis
Abstract
A new microwave annular waveguide plasma source with slot antennas is introduced in this paper. The distributions of electromagnetic field within the rectangular waveguide and the annular waveguide are simulated and analyzed, and the relationship between the distributions of the electromagnetic field and the radius of the microwave reactor is investigated. In addition, HFSS microwave studio simulator is applied to carry out the final design. Both analysis calculation and numerical simulation of the electromagnetic field distributions for the waveguide and microwave annular waveguide plasma source are presented and they are in good agreement. Copyright © 2010 John Wiley & Sons, Ltd.