The responses of capacitive pressure sensors to step and impulse waveforms are computed for small deflections and low damping using the thin-plate theory. These sensors behave as second-order systems with one degree of freedom. From present and previous results, the expression of the transfer functi
Numerical analysis of capacitive pressure micro-sensors
β Scribed by Xiaomin Wang; Mingxuan Li; Chenghao Wang
- Book ID
- 111784463
- Publisher
- SP Science China Press
- Year
- 2005
- Tongue
- English
- Weight
- 195 KB
- Volume
- 48
- Category
- Article
- ISSN
- 1006-9321
- DOI
- 10.1360/03ye0490
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π SIMILAR VOLUMES
An implementation of a low pressure meter based on a capacitive micro sensor is exposed in this paper. In the first part, we presented the analysed sensor's structure and the developed theoretical model that permits to simulate the variation of its capacitance under applied absolute pressure. Keepin
## a b s t r a c t Due to an increasing need for devices with low power consumption, capacitive pressure sensors have become good substitutes for the well known piezoresistive pressure sensors. Mathematical models are necessary to design and characterize the device, preferably the model is analyti