β Scribed by P. Pons; G. Blasquez
No coin nor oath required. For personal study only.
The responses of capacitive pressure sensors to step and impulse waveforms are computed for small deflections and low damping using the thin-plate theory. These sensors behave as second-order systems with one degree of freedom. From present and previous results, the expression of the transfer function is established. As an illustration, the responses of stainless steel, ceramic and silicon sensors featuring square or rectangular diaphragms are compared. The,lowest overshoots and settling or perturbation times are yielded by rectangular silicon diaphragms, while square diaphragms exhibit the highest sensitivity to pressure.
π SIMILAR VOLUMES
## a b s t r a c t Due to an increasing need for devices with low power consumption, capacitive pressure sensors have become good substitutes for the well known piezoresistive pressure sensors. Mathematical models are necessary to design and characterize the device, preferably the model is analyti