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Micromachined sensor structures with linear capacitive response

✍ Scribed by Lars Rosengren; Jan Söderkvist; Leif Smith

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 520 KB
Volume: 31
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(92)80104-b

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