Analysis of small deflection touch mode
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Giulio Fragiacomo; Thor Ansbæk; Thomas Pedersen; Ole Hansen; Erik V. Thomsen
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Article
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2010
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Elsevier Science
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English
β 297 KB
## a b s t r a c t Due to an increasing need for devices with low power consumption, capacitive pressure sensors have become good substitutes for the well known piezoresistive pressure sensors. Mathematical models are necessary to design and characterize the device, preferably the model is analyti