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Harmonic response of silicon capacitive pressure sensor

✍ Scribed by P. Pons; G. Blasquez; N. Ratier

Book ID: 108028066
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 332 KB
Volume: 26
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(91)87008-q

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