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Capacitive pressure sensors with stainless steel diaphragm and substrate

✍ Scribed by Chang, Sung-Pil; Allen, Mark G

Book ID: 118186789
Publisher: Institute of Physics
Year: 2004
Tongue: English
Weight: 288 KB
Volume: 14
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/14/4/023

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