A special silicon diaphragm pressure sensor with high output and high accuracy
β Scribed by Michitaka Shimazoe; Yoshitaka Matsuoka; Akio Yasukawa; Masanori Tanabe
- Publisher
- Elsevier Science
- Year
- 1981
- Weight
- 603 KB
- Volume
- 2
- Category
- Article
- ISSN
- 0250-6874
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