Sextant Avionique is currently developing a new family of micromachined silicon pressure sensors. The target accuracy is \(10^{-4}\) full scale. Therefore, the basic principle uses a vibrating concept. A membrane is stressed by the pressure and this activates a vibrating beam, the frequency of which
β¦ LIBER β¦
High accuracy pressure measurement with a silicon resonant sensor
β Scribed by John Greenwood; Troy Wray
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 231 KB
- Volume
- 37-38
- Category
- Article
- ISSN
- 0924-4247
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